|
|
Other articles related with "ion energy distribution"：
|
|
45202 |
Chan Xue(薛婵), Fei Gao(高飞), Yong-Xin Liu(刘永新), Jia Liu(刘佳), You-Nian Wang(王友年) |
| |
|
Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas |
| |
|
|
Chin. Phys. B
2018 Vol.27 (4): 45202-045202
[Abstract]
(586)
[HTML 1 KB]
[PDF 1301 KB]
(234)
|
|
|
115202 |
Shuai Wang(王帅), Hai-Feng Long(龙海凤), Zhen-Hua Bi(毕振华), Wei Jiang(姜巍), Xiang Xu(徐翔), You-Nian Wang(王友年) |
| |
|
One-dimensional hybrid simulation of the electrical asymmetry effectcaused by the fourth-order harmonic in dual-frequencycapacitively coupled plasma |
| |
|
|
Chin. Phys. B
2016 Vol.25 (11): 115202-115202
[Abstract]
(545)
[HTML 1 KB]
[PDF 487 KB]
(263)
|
| First page | Previous Page | Next Page | Last Page | Page 1 of 1 |
|
|
